Chang Liu, Assistant Professor
Department of Electrical & Computer Eng.
University of Illinois at Urbana-Champaign

E-mail: changliu@uiuc.edu
Phone: 847-491-3504

PhD, 1996, California Institute of Technology

Research Areas
The Micro-actuators, systems and sensors (MASS) group conducts basic research on the development of microfabrication technology and applications of micro-electromechanical systems (MEMS). The group is currently developing microfabricated arrayed dippen nanolithography (DPN) devices for high throughput DPN with sub-100 nm resolution. It is conjectured that the writing speed of DPN will be significantly increased with parallel writing. The development will potentially enable the DPN tool to rival established commercial lithography tools such as the electron beam lithography.

The MASS group is also involved with development of microfluidic systems and micro liquid handling components (including micro channels, pumps, and mixers) for realizing integrated laboratory-on-a-chip for biological and medical use, such as DNA sequencing and molecule separation. Dr. Liu collaborates closely with faculty members at the nanotechnology center in multidisciplinary research efforts.

Related Publications
Melvin Khoo and C. Liu, "Micro magnetic actuator using silicone elastomer membrane", Sensors and Actuators, Accepted, 2000.

Liang-Hsuan Lu, Xuefeng Wang, C. Liu, "An efficient low-cost micro fabrication method of capillary electrophoresis chip using liquid crystal polymer (LCP)", L1006, 14th International Symposium on Microscale Separations and Analysis, January 13-18, 2001, Boston, MA.

Xuefeng Wang, Liang-Hsuan Lu, and Chang Liu, "Micromachining Techniques for Liquid Crystal Polymer", MEMS 01, Switzerland, January, 2001.

C. Liu and R. Gamble, "Mass producible monolithic silicon probes for scanning probe microscopes," J. Sensors and Actuators, A. Physical, Vol. 71/3, pp. 233-237, 1998.

Chang Liu and Yong Yi, "Micromachined magnetic actuators using electroplated Permalloy," IEEE Trans. on Magnetics, Vol. 35, No. 3, pp. 1976-85, May, 1999.